Characterization of B-C-N hybrid prepared by ion implantation

Shimoyama, Iwao; Baba, Yuji; Sekiguchi, Tetsuhiro; Nath, K. G.; Sasaki, Masayoshi*; Okuno, Kenji*

Journal of Vacuum Science and Technology A, 21(6), p.1843 - 1848, 2003/11

https://doi.org/10.1116/1.1611887

Ion implantation method is applied to synthesize B-C-N hybrids and their electronic structures are characterized by X-ray photoelectron spectroscopy. A boron nitride film is deposited on a graphite target by borazine plasma implantation. At the interface between the BN film and the graphite, variety of bonding combinations including B-N, B-C, and C-N are observed. This proved that B-C-N hybrids is formed by this method.